Product Information

ZHZZ Series

The thinnest hub blades in the industry - only 10µm wide. A new high-strength bond, the H1 bond, reduces blade breakage and wavy cutting when dicing with thin kerfs.

ZHZZ series hub blades were developed with a focus on narrow street dicing and other processing methods that uses thin blades. The newly developed high-strength H1 bond is employed to improve quality when cutting thin kerfs, while also achieving stable processing. The lineup includes a 10 µm wide blade that is the thinnest in the industry, contributing to the drive for narrower streets.

Features

Reduces blade breakage and wavy cutting for thin kerfs
Enables stable processing of narrow streets
Ultrathin 10µm hub blade

Photographs of cut grooves
The ZHZZ series can produce a 10µm kerf. This is an extremely thin blade compared to 20 and 40µm blades, and has the proven ability to cut straight grooves.

Applicable Workpieces

Silicon wafers and compound semiconductor(GaAs, GaP, etc.) wafers, etc.

Applicable Machines

6000 Series and 600 Series fully automatic dicing saws
3000 Series, 300 Series, and 500 Series automatic dicing saws

Specifications

Kerf Width / Actual thickness

	Standard sizes * * Please contact a DISCO representative for details.

	Standard concentrations

Experimental Data

Wavy cutting rotational speed comparison
The ZHZZ series does not exhibit wavy cutting until very high rotational speeds are reached. Compared to previous products, wavy cutting occurs less frequently.

Evaluation was done by using the tendency for wavy cutting to occur more easily at higher rotational speeds. The rotational speed was gradually increased to determine at what rotational speed wavy cutting began.

Workpiece	:	Si φ6"
Depth	:	400µm (half cut)
Feed speed	:	90mm/s
Blade	:	ZHZZ-SD3500-H1-70
	:	ZH05-SD3500-N1-70

Breakage speed comparison
ZHZZ series blade can be pushed to a higher feed speed. Only then does the traditional breakage occur. Meaning that compared to standard blades breakage will occur less frequently.

Evaluation by using the tendency for blade breakage to occur more easily at higher feed speeds. The feed speed was increased rapidly to determine at which feed speed breakage would occur.