
Fully Automatic Dicing Saw 600 Series
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The 600 Series saws perform loading, alignment, cutting, cleaning and drying, and unloading with just the touch of a button. DFD651 and DFD691 are parallel dual-spindle dicers used for such dual-spindle applications as step cuts, bevel cuts, and dual cutting. In addition to silicon wafer dicing, the 600 Series handles ceramics, package singulation, and a wide variety of cutting and dicing tasks.
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DFD641 / DFD651
Discontinued Machines
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DFD681 / DFD691
Discontinued Machines |
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| Models |
6"-compatible automatic dicing saw |
Extra-high precision automatic cutting saw |
| Max. Workpiece Size |
ø 203.2 |
Applicable tape
frame |
2-6, 2-8 |
| X-axis |
Cutting range (mm) |
210 |
| Max cutting speed (mm/s) |
0.1 - 450 |
| Y-axis |
Cutting range (mm) |
210 |
| Index step (mm) |
0.0001 |
| Single error (mm) |
0.002 or less/5 |
| Positioning accuracy (mm) |
0.003 or less/210 |
| Scale resolution (mm) |
0.0002 |
y-axis
(for DFD651,
DFD691)
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Maximum stroke
(mm) |
26 |
| Positioning accuracy (mm) |
DFD651: 0.002 or less/26 |
DFD691: 0.002 or less/26 |
| Scale resolution (mm) |
0.0002 |
| Z-axis |
Maximum stroke
(mm) |
7.2 (for ø 2" blade) |
15.9 (for ø 3" blade) |
Moving resolution
(mm) |
0.00025 |
Repeating accuracy
(mm) |
0.001 |
| Maximum blade size (mm) |
ø 55.56 |
ø 76.2 |
| θ-axis |
Maximum rotating angle
(deg.) |
380 |
| Spindle |
Output
(kW) |
1.0 at 60,000 min-1 |
2.2 at 30,000 min-1 |
Rated torque
(N・m) |
0.16 |
0.7 |
Revolution speed range
(min-1) |
6,000 - 60,000 |
3,000 - 30,000 |
Machine dimensions
(W x D x H) (mm) |
DFD641:
1,185 x 1,168 x 1,235
DFD651:
1,350 x 1,168 x 1,235 |
1,350 x 1,168 x 1,235 |
| Machine weight (kg) |
DFD641: Approx. 1,000
DFD651: Approx. 1,300 |
Approx. 1,300 |
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The above specifications may change due to technical modifications. Please confirm when placing
your order.
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