| |
DFP8140
 |
DFP8160
|
 |
|
|
| Wafer Diameter |
ø 4" - ø 200 mm
(ø 4" - ø 8") |
ø 200 mm - ø 300 mm
(ø 8" - ø 12") |
| Polishing Method |
Anomalous In-feed grinding with wafer rotation |
| Spindle |
Type |
Air bearing with high frequency motor |
| Number of axes |
1
|
| Output (kW) |
4.8 |
7.5 |
| Revolution speed (min-1[rpm]) |
1,000 - 4,000 |
1,000 - 3,000 |
| Z-axis vertical stroke (mm) |
100 (with zero point) |
72 (with zero point) |
| Z-axis vertical grinding feed speed (mm/s) |
0.0001 - 0.08 |
| Z-axis vertical fast feed speed (mm/s) |
50 |
| Min. Z-axis vertical movement (µm) |
0.1 |
| Min. Z-axis vertical movement resolution ｵm
0.1 (µm) |
0.1 |
| Wafer Chuck Table |
Chuck table type |
Porous chuck table |
| Chuck method |
Vacuum |
| Number of revolutions (min-1[rpm]) |
0 - 300 |
| Number of chuck tables |
1 |
| Chuck table cleaning |
Backflushing of water and compressed air is
combined with oilstone cleaning and brush cleaning |
| Wafer cleaning |
Washing using an atomizing nozzle |
| Internal load sensor |
Thin force sensor |
| Spark Out (chuck table revolutions setting) |
0 - 999 |
| Y-axis processing stroke (mm) |
420 |
510 |
| Y-axis max.speed (mm/s) |
0.5 - 200 |
| Y-axis min. resolution (mm) |
0.002 |
| Dry Polishing Wheel |
ø 300 |
ø 450 |
| Wafer Handling Section / Wafer Cleaning Section |
Cassette storage quantity |
2 |
| Cassette flow |
Same flow and open flow |
| Spinner unit |
Water washing by atomizing nozzle and drying |
| Vacuum Unit |
Discharge speed (m3/h) |
29/36 50/60 (Hz) |
| Achievable pressure (kPa) |
-90
(water supply temperature
15 °C,
water supply flow rate 1L/min) |
| Electric motor (kW) |
1.5 |
| Water flow rate (L/min) |
When supplied water temperature
is greater than 22 °C : 3
When supplied water temperature is less than 22 °C : 1 |
| Dust Collector |
System |
Wet cyclone system |
| Cylinder volume (m3/min) |
4.0 |
| Motor (kW) |
1.0 |
| Water used (L/min) |
4.0 |
| Processing Accuracy |
Variation in removal amount (µm) |
±1 or less (when removing 2 ｵm in average) |
Machine dimensions
(W x D x H) (mm) |
1,200 x 2,670 x 1,800 |
1,400 x 3,322 x 1,800 |
| Machine weight (kg) |
Approx. 1,900 |
Approx. 2,400 |
