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Polishers and Dry Etchers

Fully Automatic Grinder/Polisher 8000 Series

Fully Automatic Polisher 8000 Series

Fully Automatic Dry Etcher 8000 Series

			Maximum Workpiece size	Number of Spindle axes	Number of chuck tables	Application
Grinder/Polisher	8000 Series	DGP8760	300 mm	3	4	Ultra-thin back-side grinding (100 µm or less) and stress relief
Grinder/Polisher		DGP8761	300 mm	3	4
Polisher		DFP8140	8"	1	1	Stress relief (removal of back-side grinding damage)
Polisher		DFP8160	300 mm	1	1	Stress relief (removal of back-side grinding damage)
Dry Etcher		DFE8040	8"	-	1	Wafer back-side etching
Dry Etcher		DFE8060	8"/300mm	-	1	Wafer back-side etching

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8000 Series Grinder/Polishers

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