Product Information

IF Series

IF Series Catalog
Superior Grinding Quality
Grinding Wheel IF01 Series The IF Series in-feed grinding wheels are excellent for processing not only silicon, but also compound semiconductors, ceramics, crystals, and a wide range of other materials. In addition, DISCO offers applications and IF Series wheels to match virtually any wafer size or processing requirement.

Features
  • Superior finishing quality
  • Long-life specification - high wear resistance
  • Large product range - able to process compound semiconductor wafers and crystal materials such as LiTa03
  • Polypropylene packaging - environmentally friendly

Rough grinding
A combination of high rigidity vitrified bond and large grits diamonds are employed to achieve a stable grinding process - even for wafers that are layered with oxide or nitride.
VS : Standard vitrified bond wheel
  V202 : Low concentration vitrified bond wheel for processing wafers with oxide layers

Fine grinding
By using a resin bond, which causes little damage to workpieces, a stable grinding process is attained.
As a result, the thickness accuracy (TTV) is improved and process quality, together with wheel life is enhanced. Also, surface roughness is reduced.
B-K01 : Enhances grinding quality
  V202 : Enhances wheel life
  B-K04 : Standard resin bond wheel
  B-K09 : Enables high-load processing
Etched wafer grinding (for wafer manufacturers)
Capable of precision grinding to planarize etched wafers.
B-M01 : Standard resin bond wheel for grinding etched wafers

Self-grinding
A maintenance wheel that conditions the flatness of the chuck table surface.
IF-01-1-SG-M2
: Self grinding wheel of the standard type
BGT-270 IF-01-1-20/30-V209
: Self-grinding wheel for wafer manufacturers

Applicable Workpieces
    Silicon wafers, compound semiconductor wafers, crystal materials for electronics components, etc.
Applicable Machines
    DAG800 Series, DFG800 Series and DFG8000 Series grinders
    DFP8000 Series polishers

Specifications
Standard wheel types
  Please contact a DISCO representative for details.

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