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Product Information

ZHCR Series

The ZHCR series hub blade realizes a special blade structure, restrains tip shape collapse for blades exceeding 60 μm thickness, and provides stable processing using DISCO unique technology.

For relatively thick blades in excess of 60 µm, only the blade tip midsection may wear as the number of cut lines increase. This blade tip shape collapse causes quality deterioration such as widening of the kerf and sporadic chipping. The ZHCR series restrains the collapse of the blade tip shape and realizes stable processing without deterioration using a special blade structure based on unique technology. The ZHCR series proves its worth in the following processes where blade tip shape collapse easily occurs.

Features

Processes that use blades with thicknesses exceeding 60 µm
Processing of wafers with a lot of TEG on the street
Blade dicing after laser grooving

Image of the blade tip shape
The ZHCR has properties that maintain regular blade shape for cutting processes where only the blade tip midsection wears easily.

Applicable Workpieces

Silicon wafers, etc.

Applicable Machines

6000 Series and 600 Series fully automatic dicing saws
3000 Series, 300 Series, and 500 Series automatic dicing saws

Specifications

Experimental Data

Tip shape and groove comparison (SEM Image)
As the cutting process progresses, the midsection of a regular blade becomes uneven and chipping increases. With the ZHCR, the normal shape of the blade is maintained.

(Reference) Image of the blade tip shape change
These images show that when the tip shape of a thick blade collapses, it leads to quality deterioration. The ZHCR series has properties that maintain initial blade tip shape.

Quality deterioration caused by the collapse of the blade tip shape include kerf widening, sudden chipping, curving of 2-axes step cut and workpiece damage.