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High Quality Processing of InP (Indium Phosphide)

Application processing examples

Optimization of wheels and processing parameters enables high quality processing of InP (indium phosphide) used in high-speed devices.
Selection of optical processing parameters improves the condition of the processed surface compared with the existing method.

  • Microscope Images before the improvement

    Before the improvement
  • Microscope Images after the improvement

    After the improvement
Surface Roughness after Processing a 3-inch InP Wafer
Reference: Surface Roughness after Processing a 3-inch InP Wafer(After Optimizing the Processing Parameters)
Surface roughness Ra: 0.004 µm
Surface roughness Ry: 0.033 µm


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